FT-MPS02 MEMS Probestation
2014 | FEMTOTOOLS
Micro-Electro-Mechanical Systems (MEMS) combine electrical as well as mechanical aspects on a single chip. For this reason, not only electrical, but also mechanical properties of these sensors and actuators provide valuable insights into their functionality and reliability. The FT-MPS02 MEMS Probestation is a wafer-level MEMS testing instrument that allows for the fast, user-friendly and simultaneous testing of mechanical, electrical and geometrical properties on MEMS chips.